基于原子力显微镜的压痕技术及其应用

王晓萌; 高扬

doi:10.11858/gywlxb.20230694

基于原子力显微镜的压痕技术及其应用

doi: 10.11858/gywlxb.20230694

王晓萌^1,,
高扬^{1, 2,*, ,}

1.
浙江大学航空航天学院, 交叉力学中心, 浙江杭州　310027
2.
浙江省软体机器人与智能器件研究重点实验室, 浙江杭州　310027

基金项目: 国家自然科学基金（12102386，12192211）

详细信息

作者简介:
王晓萌（1999－），男，硕士研究生，主要从事二维材料力学性质研究. E-mail：22124005@zju.edu.cn

通讯作者:
高　扬（1989－），男，博士，研究员，主要从事微纳米力学及二维材料研究. E-mail：ygao96@zju.edu.cn

中图分类号: O521.3; O521.2
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- PDF下载量: 55
出版历程
- 收稿日期: 2023-07-20
- 修回日期: 2023-09-04
- 网络出版日期: 2023-11-20
- 刊出日期: 2023-12-15

Atomic Force Microscope Based Indentation Techniques and Their Applications

WANG Xiaomeng^1
,,
GAO Yang^{1, 2,*
, ,}

1.
Center for X-Mechanics, School of Aeronautics and Astronautics, Zhejiang University, Hangzhou 310027, Zhejiang, China
2.
Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Hangzhou 310027, Zhejiang, China

摘要

摘要: 基于原子力显微镜的压痕技术具有高分辨、高精度等优点，是表征材料力学性质的重要手段，在材料科学、纳米科学、生物力学等领域具有广泛应用。首先，介绍了原子力显微镜及相关压痕技术的基本工作原理；然后，回顾总结了基于原子力显微镜的压痕技术在低维材料、软材料等领域的应用；接着，简要综述了原子力显微镜技术在二维材料高压相变方面的最新研究进展，着重介绍基于原子力显微镜的新型埃压痕技术，该技术可施加亚纳米级压痕深度，有效表征与调控二维材料的层间耦合作用；最后，对基于原子力显微镜的压痕技术在未来的发展和应用进行了展望。
- 原子力显微镜 /
- 压痕技术 /
- 二维材料 /
- 高压相变
Abstract: Indentation techniques based on atomic force microscopy (AFM) have been widely used in characterizing the mechanical properties of various types of materials, due to their high lateral resolution and vertical precision. This review article begins with a concise introduction to the fundamental principles of AFM and related indentation techniques. Subsequently, it extensively discusses and reviews the applications of AFM-based indentation techniques in measuring the mechanical properties of low-dimensional materials, biological materials, etc. This article also reviews the latest progress of the applications of AFM in the research of high-pressure phase transition in two-dimensional materials. Particularly, we introduce a novel angstrom-indentation technique, which enables atomic-level deformation on the samples. Angstrom-indentation allows for highly effective characterization and tuning of the interlayer coupling in two-dimensional materials. Finally, we make an outlook on the development of AFM-based indentation techniques.
- atomic force microscopy /
- indentation /
- two-dimensional materials /
- high-pressure phase transition

HTML全文

图 1 基于AFM的压痕技术的应用

Figure 1. Applications of indentation techniques based on AFM

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图 2 AFM和压痕技术

Figure 2. AFM and indentation techniques

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图 3 二维材料示意图^[12–13]

Figure 3. Schematic of 2D materials^[12–13]

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图 4 悬空二维材料的纳米压痕实验^{[3, 46, 48]}

Figure 4. Nanoindentation experiment of suspended two-dimensional materials^{[3, 46, 48]}

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图 5 悬空金属薄膜的纳米压痕实验^[11]

Figure 5. Nanoindentation experiment of suspended metal nanosheets^[11]

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图 6 埃压痕实验装置、弹性力学模型以及实验结果^[59]

Figure 6. Å-indentation experimental set-up, elastic mechanics model and experimental results^[59]

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图 7 氧化石墨烯的层间力学性质^[60]

Figure 7. Interlayer elasticity of graphene oxide^[60]

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图 8 双层石墨烯-单层金刚石相变^[71–72]

Figure 8. Bilayer graphene-monolayer diamond phase transition^[71–72]

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图 9 六方氮化硼-金刚石氮化硼相变^[81]

Figure 9. Hexagonal-to-diamond phase transition of boron nitride^[81]

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图 10 生物材料的纳米压痕实验^[92–94]

Figure 10. AFM-based indentation on biomaterials^[92–94]

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表 1 基于悬空纳米压痕技术获得的部分常见二维材料的力学性能

Table 1. Mechanical properties of some typical 2D materials by suspended nanoindentation

Materials	Elastic modulus/GPa	Strength/GPa
Monolayer graphene^[3]	1000±100	130
Monolayer boron nitride^[45]	865±73	70.5±5.5
Monolayer MoS₂^[43]	270±100	23
Multilayer MoS₂^[46]	210–370
Monolayer WSe₂^[56]	258.6±38.3	38.0±6.0
Multilayer WSe₂^[55]	167.3±6.7	12.4
Monolayer WS₂^[56]	302.4±24.1	47.0±8.6
Monolayer WTe₂^[56]	149.1±9.4	6.4±3.3
Multilayer black phosphorous^[54]	276±32.4	25

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