Ablation Properties of Nanosecond Laser-Irradiated SiC Material
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摘要: 建立了纳秒脉冲激光烧蚀SiC的实验平台和激光烧蚀诱导等离子体的实验测量系统，并采用一维流体力学程序模拟了高功率激光烧蚀SiC的过程和烧蚀过程中产生等离子体射流的动力学过程，获得了纳秒激光对SiC的烧蚀规律，研究了激光烧蚀过程中产生的等离子体对烧蚀效率的影响。研究结果可为纳秒激光烧蚀材料的相关工程化应用提供参考。Abstract: A nanosecond pulsed laser ablation platform of SiC material and a nanosecond pulsed laser induced plasma experimental system were established. One dimensional fluid mechanics code was used to simulate the dynamic process of plasma jet generated by high power laser during the ablation of SiC material. The nanosecond pulsed laser ablation rule of SiC material was obtained, and the effect of laser induced plasma on ablation depth was verified through experiment and numerical simulation. The research results can provide reference for material engineering applications related to nanosecond laser ablation.
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图 4 纳秒激光烧蚀SiC后材料表面的SEM图像及EDS分析结果
Figure 4. SEM images and EDS of SiC materials after nanosecond laser ablation
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